SIX TO TEN KHz, OR GREATER GAS DISCHARGE LASER SYSTEM

Details for Australian Patent Application No. 2002323175 (hide)

Owner CYMER, INC.

Inventors PALENSCHAT, Frederick, A.; HOFMANN, Thomas; RETTIG, Curtis, L.; NESS, Richard, L.; MELCHER, Paul, C.; ERSHOV, Alexander, I.; WATSON, Tom, A.; UJAZDOWSKI, Richard, C.; IVASCHENKO, Alex, P.; SHANNON, Robert, A.; SANDSTROM, Richard, L.; WEBB, Robert, Kyle

Pub. Number AU-A-2002323175

PCT Number PCT/US02/26011

PCT Pub. Number WO2003/021731

Priority 09/943,343 29.08.01 US; 10/029,319 17.10.01 US; 10/012,002 30.11.01 US; 10/036,676 21.12.01 US; 10/141,216 07.05.02 US; 10/187,336 28.06.02 US

Filing date 16 August 2002

Wipo publication date 18 March 2003

International Classifications

H01S 003/22 Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves

Event Publications

16 January 2003 Complete Application Filed

  Priority application(s): 09/943,343 29.08.01 US; 10/029,319 17.10.01 US; 10/012,002 30.11.01 US; 10/036,676 21.12.01 US; 10/141,216 07.05.02 US; 10/187,336 28.06.02 US

5 June 2003 Application Open to Public Inspection

  Published as AU-A-2002323175

10 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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