ENHANCED ION BEAM ETCH SELECTIVITY OF MAGNETIC THIN FILMS USING CARBON-BASED GASES

Details for Australian Patent Application No. 2002323114 (hide)

Owner SEAGATE TECHNOLOGY LLC

Inventors MINOR, Michael, K.; COVINGTON, Mark, W.; SEIGLER, Michael, A.; SINGLETON, Eric, W.

Pub. Number AU-A-2002323114

PCT Number PCT/US02/25528

PCT Pub. Number WO2003/019590

Priority 60/313,919 21.08.01 US

Filing date 12 August 2002

Wipo publication date 10 March 2003

International Classifications

H01F 041/18 Apparatus or processes specially adapted for manufacturing or assembling the devices covered by this subclass

G11B 005/31 Recording by magnetisation or demagnetisation of a record carrier - using thin film

H01F 041/30 Apparatus or processes specially adapted for manufacturing or assembling the devices covered by this subclass

Event Publications

16 January 2003 Complete Application Filed

  Priority application(s): 60/313,919 21.08.01 US

5 June 2003 Application Open to Public Inspection

  Published as AU-A-2002323114

6 May 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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