METHODS FOR THE PRODUCTION OF COMPONENTS AND ULTRA HIGH VACUUM CVD REACTOR

Details for Australian Patent Application No. 2002322956 (hide)

Owner UNAXIS BALZERS AKTIENGESELLSCHAFT

Inventors BUSCHBECK, Hans, Martin; BARTHOLET, Philipp; WILTSCHE, Siegfried; RAMM, Jurgen

Pub. Number AU-A-2002322956

PCT Number PCT/CH02/00467

PCT Pub. Number WO2003/031680

Priority 1889/01 12.10.01 CH

Filing date 28 August 2002

Wipo publication date 22 April 2003

International Classifications

C23C 016/54 Chemical deposition or plating by decomposition - Apparatus specially adapted for continuous coating

C30B 025/10 Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth - Heating of the reaction chamber or the substrate

C23C 016/458 Chemical deposition or plating by decomposition - characterised by the method used for supporting substrates in the reaction chamber

Event Publications

16 January 2003 Complete Application Filed

  Priority application(s): 1889/01 12.10.01 CH

3 July 2003 Application Open to Public Inspection

  Published as AU-A-2002322956

1 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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