GUARD HEATER AND PRESSURE CHAMBER ASSEMBLY INCLUDING THE SAME

Details for Australian Patent Application No. 2002322743 (hide)

Owner MICELL TECHNOLOGIES, INC.

Inventors WORM, Steve, L.; MCCLAIN, James, B.

Pub. Number AU-A-2002322743

PCT Number PCT/US02/24006

PCT Pub. Number WO2003/023828

Priority 09/951,345 13.09.01 US

Filing date 30 July 2002

Wipo publication date 24 March 2003

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

B08B 007/00 Cleaning by methods not provided for in a single other subclass or a single group in this subclass

Event Publications

16 January 2003 Complete Application Filed

  Priority application(s): 09/951,345 13.09.01 US

19 June 2003 Application Open to Public Inspection

  Published as AU-A-2002322743

10 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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