SYSTEMS AND METHODS FOR PROCESSING WORKPIECES

Details for Australian Patent Application No. 2002322586 (hide)

Owner SEMITOOL, INC.

Inventors LUND, Erik; LANFRANKIE, Joe; LUND, Worm; SCRANTON, Dana, R.; BERGMAN, Eric

Pub. Number AU-A-2002322586

PCT Number PCT/US02/23296

PCT Pub. Number WO2003/008114

Priority 09/907,544 16.07.01 US; 09/907,487 16.07.01 US; 09/907,485 16.07.01 US

Filing date 10 July 2002

Wipo publication date 3 March 2003

International Classifications

B08B 003/00 Cleaning by methods involving the use or presence of liquid or steam

B08B 003/02 Cleaning by methods involving the use or presence of liquid or steam - Cleaning by the force of jets or sprays

B08B 003/04 Cleaning by methods involving the use or presence of liquid or steam - Cleaning involving contact with liquid

B08B 007/04 Cleaning by methods not provided for in a single other subclass or a single group in this subclass - by a combination of operations

Event Publications

16 January 2003 Complete Application Filed

  Priority application(s): 09/907,544 16.07.01 US; 09/907,487 16.07.01 US; 09/907,485 16.07.01 US

22 May 2003 Application Open to Public Inspection

  Published as AU-A-2002322586

8 April 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2002322587-APPARATUS FOR PROCESSING A WORKPIECE

2002322585-FAT ACCUMULATION-MODULATING COMPOUNDS