METHOD AND APPARATUS FOR DEPOSITING TUNGSTEN AFTER SURFACE TREATMENT TO IMPROVE FILM CHARACTERISTICS

Details for Australian Patent Application No. 2002322496 (hide)

Owner APPLIED MATERIALS, INC.

Inventors BYUN, Jeong, Soo

Pub. Number AU-A-2002322496

PCT Number PCT/US02/22487

PCT Pub. Number WO2003/009360

Priority 60/305,765 16.07.01 US

Filing date 16 July 2002

Wipo publication date 3 March 2003

International Classifications

H01L 021/285 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/768 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

16 January 2003 Complete Application Filed

  Priority application(s): 60/305,765 16.07.01 US

22 May 2003 Application Open to Public Inspection

  Published as AU-A-2002322496

8 April 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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