INJECTION SEEDED F2 LASER WITH LINE SELECTION AND DISCRIMINATION

Details for Australian Patent Application No. 2002322439 (hide)

Owner CYMER, INC.

Inventors SANDSTROM, Richard, L.; NESS, Richard, M.; PARTLO, William, N.; ERSHOV, Alexander, I.; OH, Choonghoon; ONKELS, Eckehard, D.

Pub. Number AU-A-2002322439

PCT Number PCT/US02/21867

PCT Pub. Number WO2002/099938

Priority 09/829,475 09.04.01 US; 09/848,043 03.05.01 US; 09/855,310 14.05.01 US; 09/879,311 12.06.01 US

Filing date 3 April 2002

Wipo publication date 16 December 2002

International Classifications

H01S 003/10 Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves - Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating

H01S 003/00 Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves

H01S 003/22 Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves

H01S 003/223 Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves

Event Publications

16 January 2003 Complete Application Filed

  Priority application(s): 09/829,475 09.04.01 US; 09/848,043 03.05.01 US; 09/855,310 14.05.01 US; 09/879,311 12.06.01 US

8 May 2003 Application Open to Public Inspection

  Published as AU-A-2002322439

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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