Method and system for single ion implantation

Details for Australian Patent Application No. 2002322184 (hide)

Owner Qucor Pty Ltd

Inventors Prawer, Steven; Clark, Robert Graham; Dzurak, Andrew Steven; Yang, Changyi; Jamieson, David Norman

Agent FB Rice

Pub. Number AU-B-2002322184

PCT Number PCT/AU02/01150

PCT Pub. Number WO2003/019635

Priority PR 7289 27.08.01 AU

Filing date 27 August 2002

Wipo publication date 10 March 2003

Acceptance publication date 29 March 2007

International Classifications

H01J 37/317 (2006.01) Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - for changing properties of the objects or for applying thin layers thereon, e.g. ion implantation

G06N 1/00 (2006.01)

H01L 21/265 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

16 January 2003 Complete Application Filed

  Priority application(s): PR 7289 27.08.01 AU

5 June 2003 Application Open to Public Inspection

  Published as AU-B-2002322184

13 October 2005 Assignment before Grant

  Unisearch Limited The application has been assigned to Qucor Pty Ltd

29 March 2007 Application Accepted

  Published as AU-B-2002322184

2 August 2007 Standard Patent Sealed

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