METHOD OF SELECTIVE REMOVAL OF SIGE ALLOYS

Details for Australian Patent Application No. 2002322105 (hide)

Owner AMBERWARE SYSTEMS CORPORATION

Inventors HAMMOND, Richard; CURRIE, Matthew

Pub. Number AU-A-2002322105

PCT Number PCT/US02/18973

PCT Pub. Number WO2002/103760

Priority 60/298,153 14.06.01 US

Filing date 14 June 2002

Wipo publication date 2 January 2003

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

16 January 2003 Complete Application Filed

  Priority application(s): 60/298,153 14.06.01 US

15 May 2003 Application Open to Public Inspection

  Published as AU-A-2002322105

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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