METHOD FOR GENERATING HIGHCONTRAST IMAGES OF SEMICONDUCTOR SITES VIA ONE-PHOTON OPTICAL BEAMINDUCED CURRENT IMAGING AND CONFOCAL REFLECTANCE MICROSCOPY

Details for Australian Patent Application No. 2002321962 (hide)

Owner SALOMA, Caesar, A. DARIA, Vincent, Ricardo, M. MIRANDA, Jelda, Jayne, C.

Inventors SALOMA, Caesar, A.; MIRANDA, Jelda, Jayne, C.; DARIA, Vincent, Ricardo, M.

Pub. Number AU-A-2002321962

PCT Number PCT/PH02/00013

PCT Pub. Number WO2004/008164

Filing date 9 July 2002

Wipo publication date 2 February 2004

International Classifications

G01R 031/311 Arrangements for testing electric properties

G01R 031/265 Arrangements for testing electric properties

G02B 021/00 Microscopes

G01R 031/308 Arrangements for testing electric properties

Event Publications

16 January 2003 Complete Application Filed

18 March 2004 Application Open to Public Inspection

  Published as AU-A-2002321962

7 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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