A MICROELECTROMECHANICAL DEVICE HAVING A STIFFENED SUPPORT BEAM, AND METHODS OF FORMING STIFFENED SUPPORT BEAMS IN MEMS

Details for Australian Patent Application No. 2002321901 (hide)

International Classifications

Event Publications

16 January 2003 Complete Application Filed

Priority application(s): 09/924,370 07.08.01 US

19 June 2003 Application Open to Public Inspection

Published as AU-A-2002321901

6 May 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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