SYSTEM AND METHOD FOR IDENTFYING DUMMY FEATURES ON A MASK LAYER

Details for Australian Patent Application No. 2002321495 (hide)

Owner NUMERICAL TECHNOLOGIES, INC. FREEMAN, Jacqueline, Carol

Inventors FREEMAN, Jacqueline, Carol; PIERRAT, Christophe; CHANG, Fang-Cheng

Pub. Number AU-A-2002321495

PCT Number PCT/GB02/03812

PCT Pub. Number WO2003/021654

Priority 09/941,453 28.08.01 US

Filing date 16 August 2002

Wipo publication date 18 March 2003

International Classifications

H01L 021/66 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

H01L 021/3105 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

16 January 2003 Complete Application Filed

  Priority application(s): 09/941,453 28.08.01 US

5 June 2003 Application Open to Public Inspection

  Published as AU-A-2002321495

17 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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