OXIDATION OF SILICON NITRIDE FILMS IN SEMICONDUCTOR DEVICES

Details for Australian Patent Application No. 2002321101 (hide)

Owner INTERNATIONAL BUSINESS MACHINES

Inventors GILBERT, Jeffrey, D.; GLUSCHENKOV, Oleg; HEENAN, Carol, J.; JAMMY, Rajarao; BALLANTINE, Arne, W.; FALTERMEIER, Jonathan, E.; FLAITZ, Philip, L.

Pub. Number AU-A-2002321101

PCT Number PCT/EP02/06916

PCT Pub. Number WO2002/099866

Priority 09/874,144 05.06.01 US

Filing date 4 June 2002

Wipo publication date 16 December 2002

International Classifications

H01L 021/314 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

16 January 2003 Complete Application Filed

  Priority application(s): 09/874,144 05.06.01 US

8 May 2003 Application Open to Public Inspection

  Published as AU-A-2002321101

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2002321102-BIPOLAR TRANSISTOR WITH RAISED EXTRINSIC BASE FABRICATED IN AN INTEGRATED BICMOS CIRCUIT

2002321100-MEDICAMENTS CONTAINING TETRAHYDROISOQUINOLINE DERIVATIVES