PRODUCTION METHOD FOR SEMICONDUCTOR DEVICE

Details for Australian Patent Application No. 2002320679 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors MAEKAWA, Kaoru

Pub. Number AU-A-2002320679

PCT Number PCT/JP02/07452

PCT Pub. Number WO2003/010814

Priority 2001-221897 23.07.01 JP

Filing date 23 July 2002

Wipo publication date 17 February 2003

International Classifications

H01L 021/768 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/3065 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

16 January 2003 Complete Application Filed

  Priority application(s): 2001-221897 23.07.01 JP

29 May 2003 Application Open to Public Inspection

  Published as AU-A-2002320679

8 April 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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