ULTRASONIC CONDITIONING DEVICE CLEANER FOR CHEMICAL MECHANICAL POLISHING SYSTEMS

Details for Australian Patent Application No. 2002320625 (hide)

Owner HONEYWELL INTERNATIONAL, INC.

Inventors JANZEN, John, W.

Pub. Number AU-A-2002320625

PCT Number PCT/US02/22909

PCT Pub. Number WO2003/009966

Priority 09/911,531 24.07.01 US

Filing date 18 July 2002

Wipo publication date 17 February 2003

International Classifications

B24B 001/04 - subjecting the grinding or polishing tools, the abrading or polishing medium or work to vibration, e.g. grinding with ultrasonic frequency

B24B 053/007 Devices or means for dressing or conditioning abrasive surfaces - Cleaning of grinding wheels

B24B 037/04 Lapping machines or devices, i.e. requiring pulverulent abrading substances inserted between a lap of relatively soft but rigid material and the surface to be lapped - designed for working plane surfaces

Event Publications

16 January 2003 Complete Application Filed

  Priority application(s): 09/911,531 24.07.01 US

29 May 2003 Application Open to Public Inspection

  Published as AU-A-2002320625

8 April 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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