METHOD OF MANUFACTURING A SEMICONDUCTOR STRUCTURE COMPRISING SIC ON AN OXIDE LAYER

Details for Australian Patent Application No. 2002320606 (hide)

Owner ROSEMOUNT AEROSPACE, INC.

Inventors ERIKSEN, Odd, Harald, Steen; GUO, Shuwen

Pub. Number AU-A-2002320606

PCT Number PCT/US02/22826

PCT Pub. Number WO2003/017358

Priority 09/932,001 17.08.01 US

Filing date 17 July 2002

Wipo publication date 3 March 2003

International Classifications

H01L 021/762 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

G01L 009/00 Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elements

H01L 021/04 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/76 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

16 January 2003 Complete Application Filed

  Priority application(s): 09/932,001 17.08.01 US

29 May 2003 Application Open to Public Inspection

  Published as AU-A-2002320606

6 May 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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