PLASMA CURING OF MSQ-BASED POROUS LOW-K FILM MATERIALS

Details for Australian Patent Application No. 2002320478 (hide)

Owner AXCELIS TECHNOLOGIES, INC. CHEMAT TECHNOLOGY, INC.

Inventors ESCORCIA, Orlando; BERRY, Ivan, L., III; BALL, Ian; HAN, Qingyuan; JANG, Jeff; ALBANO, Ralph; WALDFRIED, Carlo

Pub. Number AU-A-2002320478

PCT Number PCT/US02/22213

PCT Pub. Number WO2003/015150

Priority 09/906,276 16.07.01 US

Filing date 15 July 2002

Wipo publication date 24 February 2003

International Classifications

H01L 021/312 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

16 January 2003 Complete Application Filed

  Priority application(s): 09/906,276 16.07.01 US

19 June 2003 Application Open to Public Inspection

  Published as AU-A-2002320478

8 April 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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