HIGH TEMPERATURE SUBSTRATE TRANSFER ROBOT

Details for Australian Patent Application No. 2002320464 (hide)

Owner APPLIED MATERIALS, INC.

Inventors CIULIK, James, R.; FREEMAN, Marvin, L.; VAN GOGH, David, A.; PENCIS, Chris, Holt; HUDGENS, Jeffrey, C.; COX, Damon, Keith; RICE, Michael

Pub. Number AU-A-2002320464

PCT Number PCT/US02/22127

PCT Pub. Number WO2003/007349

Priority 09/905,091 12.07.01 US; 09/928,923 13.08.01 US

Filing date 12 July 2002

Wipo publication date 29 January 2003

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

16 January 2003 Complete Application Filed

  Priority application(s): 09/905,091 12.07.01 US; 09/928,923 13.08.01 US

22 May 2003 Application Open to Public Inspection

  Published as AU-A-2002320464

8 April 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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