METHOD AND APPARATUS FOR CLEANING SEMICONDUCTOR WAFERS AND OTHER FLAT MEDIA

Details for Australian Patent Application No. 2002320436 (hide)

Owner NORBY, Jerry, R. SEMITOOL, INC. BEXTEN, Daniel, P. BRYER, James

Inventors NORBY, Jerry, R.; BRYER, James; BEXTEN, Daniel, P.

Pub. Number AU-A-2002320436

PCT Number PCT/US02/21997

PCT Pub. Number WO2003/006183

Priority 09/905,030 12.07.01 US; 10/108,278 26.03.02 US

Filing date 9 July 2002

Wipo publication date 29 January 2003

International Classifications

B08B 003/02 Cleaning by methods involving the use or presence of liquid or steam - Cleaning by the force of jets or sprays

Event Publications

16 January 2003 Complete Application Filed

  Priority application(s): 09/905,030 12.07.01 US; 10/108,278 26.03.02 US

22 May 2003 Application Open to Public Inspection

  Published as AU-A-2002320436

8 April 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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