SUBSTRATE HANDLING END EFFECTOR

Details for Australian Patent Application No. 2002320196 (hide)

Owner BROOKS AUTOMATION, INC.

Inventors HA, Tuan, T.; ELMALI, Hakan

Pub. Number AU-A-2002320196

PCT Number PCT/US02/20594

PCT Pub. Number WO2003/004180

Priority 09/898,693 03.07.01 US

Filing date 26 June 2002

Wipo publication date 21 January 2003

International Classifications

B08B 009/00 Cleaning hollow articles by methods or apparatus specially adapted thereto

B08B 009/027 Cleaning hollow articles by methods or apparatus specially adapted thereto

B08B 009/032 Cleaning hollow articles by methods or apparatus specially adapted thereto

Event Publications

16 January 2003 Complete Application Filed

  Priority application(s): 09/898,693 03.07.01 US

22 May 2003 Application Open to Public Inspection

  Published as AU-A-2002320196

18 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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