OXYNITRIDE SHALLOW TRENCH ISOLATION AND METHOD OF FORMATION

Details for Australian Patent Application No. 2002320035 (hide)

Owner INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventors BEYER, Klaus, D.; JAMIN, Fen, F.; VAREKAMP, Patrick, R.

Pub. Number AU-A-2002320035

PCT Number PCT/US02/16004

PCT Pub. Number WO2002/095818

Priority 09/863,980 23.05.01 US

Filing date 17 May 2002

Wipo publication date 3 December 2002

International Classifications

H01L 021/762 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

16 January 2003 Complete Application Filed

  Priority application(s): 09/863,980 23.05.01 US

8 May 2003 Application Open to Public Inspection

  Published as AU-A-2002320035

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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