SPUTTERING DEPOSITION APPARATUS AND METHOD FOR DEPOSITING SURFACE FILMS

Details for Australian Patent Application No. 2002320009 (hide)

Owner LAMPKIN, Curtis, M.

Inventors LAMPKIN, Curtis, M.

Pub. Number AU-A-2002320009

PCT Number PCT/US02/01148

PCT Pub. Number WO2002/084702

Priority 60/261,735 16.01.01 US

Filing date 11 January 2002

Wipo publication date 28 October 2002

International Classifications

H01J 037/34 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

Event Publications

16 January 2003 Complete Application Filed

  Priority application(s): 60/261,735 16.01.01 US

17 April 2003 Application Open to Public Inspection

  Published as AU-A-2002320009

5 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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