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Details for Australian Patent Application No. 2002319636 (hide)

Owner MASSACHUSETTS INSTITUTE OF TECHNOLOGY

Inventors JENSEN, Klavs, F.; LAHANN, Jorg; LANGER, Robert

Pub. Number AU-A-2002319636

PCT Number PCT/US02/23259

PCT Pub. Number WO2003/010354

Priority 09/912,166 24.07.01 US

Filing date 23 July 2002

Wipo publication date 17 February 2003

International Classifications

C23C 016/00 Chemical deposition or plating by decomposition

Event Publications

16 January 2003 Complete Application Filed

  Priority application(s): 09/912,166 24.07.01 US

29 May 2003 Application Open to Public Inspection

  Published as AU-A-2002319636

8 April 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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