PLASMA CHAMBER WALL SEGMENT TEMPERATURE CONTROL

Details for Australian Patent Application No. 2002319624 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors LONG, Maolin; MOROZ, Paul; FINK, Steven; JONES, William; MITROVIC, Andrej

Pub. Number AU-A-2002319624

PCT Number PCT/US02/23207

PCT Pub. Number WO2003/012567

Priority 60/308,447 30.07.01 US

Filing date 19 July 2002

Wipo publication date 17 February 2003

International Classifications

G05D 023/00 Control of temperature

H05H 001/00 Generating plasma

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

16 January 2003 Complete Application Filed

  Priority application(s): 60/308,447 30.07.01 US

29 May 2003 Application Open to Public Inspection

  Published as AU-A-2002319624

6 May 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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