PROCESSING APPARATUS AND PROCESSING METHOD

Details for Australian Patent Application No. 2002318804 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors ISHII, Katsumi; TAKAHASHI, Nobuaki

Pub. Number AU-A-2002318804

PCT Number PCT/JP02/07064

PCT Pub. Number WO2003/010800

Priority 2001-224055 25.07.01 JP; 2001-224163 25.07.01 JP; 2001-224520 25.07.01 JP; 2001-224020 25.07.01 JP

Filing date 11 July 2002

Wipo publication date 17 February 2003

International Classifications

H01L 021/02 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof -

H01L 021/205 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/31 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/68 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

9 January 2003 Complete Application Filed

  Priority application(s): 2001-224055 25.07.01 JP; 2001-224163 25.07.01 JP; 2001-224520 25.07.01 JP; 2001-224020 25.07.01 JP

29 May 2003 Application Open to Public Inspection

  Published as AU-A-2002318804

8 April 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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