PROJECTION OPTICAL SYSTEM PRODUCTION METHOD

Details for Australian Patent Application No. 2002318651 (hide)

Owner NIKON CORPORATION

Inventors OZAWA, Toshihiko; OMURA, Yasuhiro; SUZUKI, Takeshi; FUJISHIMA, Youhei; IKEZAWA, Hironori

Pub. Number AU-A-2002318651

PCT Number PCT/JP02/07017

PCT Pub. Number WO2003/007045

Priority 2001-208837 10.07.01 JP; 2001-257809 28.08.01 JP

Filing date 10 July 2002

Wipo publication date 29 January 2003

International Classifications

G02B 007/02 Mountings, adjusting means, or light-tight connections, for optical elements - for lenses

H01L 021/02 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof -

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

G02B 013/24 Optical objectives specially designed for the purposes specified below - for reproducing or copying at short object distances

G02B 013/14 Optical objectives specially designed for the purposes specified below - for use with infra-red or ultra-violet radiation

G02B 001/02 Optical elements characterised by the material of which they are made

Event Publications

9 January 2003 Complete Application Filed

  Priority application(s): 2001-208837 10.07.01 JP; 2001-257809 28.08.01 JP

22 May 2003 Application Open to Public Inspection

  Published as AU-A-2002318651

8 April 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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