DEVICE FOR REDUCING THE IMPACT OF DISTORTIONS IN A MICROSCOPE

Details for Australian Patent Application No. 2002318511 (hide)

Owner NANOFACTORY INSTRUMENTS AB

Inventors HOSPERS, Martin; OLIN, Hakan; SVENSSON, Krister; ALTHOFF, Fredrik; DANILOV, Andrey; BENGTSSON, Paul

Pub. Number AU-A-2002318511

PCT Number PCT/SE02/01385

PCT Pub. Number WO2003/007328

Priority 0103782-9 12.11.01 SE; 0103779-5 12.11.01 SE; 0102498-3 13.07.01 SE

Filing date 12 July 2002

Wipo publication date 29 January 2003

International Classifications

H01J 037/20 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Means for supporting or positioning the object or the material

Event Publications

9 January 2003 Complete Application Filed

  Priority application(s): 0103782-9 12.11.01 SE; 0103779-5 12.11.01 SE; 0102498-3 13.07.01 SE

22 May 2003 Application Open to Public Inspection

  Published as AU-A-2002318511

8 April 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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