APPARATUS AND METHOD FOR CONTROLLING GALVANIC CORROSION EFFECTS ON A SINGLEWAFER CLEANING SYSTEM

Details for Australian Patent Application No. 2002318307 (hide)

Owner LAM RESEARCH CORPORATION

Inventors MIKHAYLICH, Katrina A.; BOYD, John M.; RAVKIN, Mike

Pub. Number AU-A-2002318307

PCT Number PCT/US02/22106

PCT Pub. Number WO2003/007348

Priority 60/305,372 13.07.01 US; 10/013,211 07.12.01 US

Filing date 11 July 2002

Wipo publication date 29 January 2003

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

9 January 2003 Complete Application Filed

  Priority application(s): 60/305,372 13.07.01 US; 10/013,211 07.12.01 US

22 May 2003 Application Open to Public Inspection

  Published as AU-A-2002318307

8 April 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2002318308-SURFACE-ENHANCED RAMAN OPTICAL DATA STORAGE (SERODS) WITH PAPALLEL SIGNAL TRANSFER

2002318306-Methods and devices based upon a novel form of nucleic acid duplex on a surface