METHODS AND APPARATUS FOR CLEANING AND/OR TREATING A SUBSTRATE USING CO2

Details for Australian Patent Application No. 2002317593 (hide)

Owner MICELL TECHNOLOGIES, INC.

Inventors COLE, Michael, E.; WORM, Steve, L.; BRAINARD, David, E.; DEYOUNG, James, P.; MCCLAIN, James, P.

Pub. Number AU-A-2002317593

PCT Number PCT/US02/24007

PCT Pub. Number WO2003/023840

Priority 09/951,353 13.09.01 US

Filing date 30 July 2002

Wipo publication date 24 March 2003

International Classifications

H01L 021/306 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

9 January 2003 Complete Application Filed

  Priority application(s): 09/951,353 13.09.01 US

19 June 2003 Application Open to Public Inspection

  Published as AU-A-2002317593

10 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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