Substrate processing apparatus

Details for Australian Patent Application No. 2002317551 (hide)

International Classifications

Event Publications

9 January 2003 Complete Application Filed

Priority application(s): 60/306,432 20.07.01 US

22 May 2003 Application Open to Public Inspection

Published as AU-B-2002317551

19 October 2006 Application Accepted

Published as AU-B-2002317551

15 February 2007 Standard Patent Sealed

17 February 2011 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This patent ceased under section 143(a), or Expired. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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