PRODUCTION AND USE OF TETRAFLUOROSILANE

Details for Australian Patent Application No. 2002317507 (hide)

Owner SHOWA DENKO K. K.

Inventors ATOBE, Hitoshi; OKA, Masakazu; KANEKO, Toraichi

Pub. Number AU-A-2002317507

PCT Number PCT/JP02/07069

PCT Pub. Number WO2003/006374

Priority 2001-212890 12.07.01 JP; 60/306,420 20.07.01 US

Filing date 11 July 2002

Wipo publication date 29 January 2003

International Classifications

C01B 033/107 Silicon

H01L 021/205 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C03B 037/00 Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags

G01N 030/14 Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography

B01D 053/22 Separation of gases or vapours - by diffusion

H01L 031/20 Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation

Event Publications

9 January 2003 Complete Application Filed

  Priority application(s): 2001-212890 12.07.01 JP; 60/306,420 20.07.01 US

22 May 2003 Application Open to Public Inspection

  Published as AU-A-2002317507

8 April 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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