APPARATUS FOR VACUUM VAPORIZATION

Details for Australian Patent Application No. 2002317488 (hide)

Owner GALILEO VACUUM SYSTEMS S.R.L.

Inventors FUSI, Andrea GALLATIN STEEL COMPANY see KIMMEL'S COAL AND RECYCLING, INC/ GHENT OPERATION (21) 2002319623

Pub. Number AU-A-2002317488

PCT Number PCT/IT02/00411

PCT Pub. Number WO2003/004720

Priority FI2001A000122 03.07.01 IT

Filing date 21 June 2002

Wipo publication date 21 January 2003

International Classifications

C23C 014/56 Coating by vacuum evaporation, by sputtering or by ion implantation - Apparatus specially adapted for continuous coating

C23C 014/24 Coating by vacuum evaporation, by sputtering or by ion implantation - Vacuum evaporation

C23C 014/26 Coating by vacuum evaporation, by sputtering or by ion implantation - by resistance or inductive heating of the source

Event Publications

9 January 2003 Complete Application Filed

  Priority application(s): FI2001A000122 03.07.01 IT

22 May 2003 Application Open to Public Inspection

  Published as AU-A-2002317488

18 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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