INCREASED STABILITY LOW CONCENTRATION GASES, PRODUCTS COMPRISING SAME, AND METHODS OF MAKING SAME

Details for Australian Patent Application No. 2002317422 (hide)

Owner L'AIR LIQUIDE-SOCIETE ANONYME A DIRECTOIRE ET CONSEIL DE SURVEILLANCE POUR L'ETUDE ET L'EXPLOITATION

Inventors JACKSIER, Tracey; BENESCH, Robert

Pub. Number AU-A-2002317422

PCT Number PCT/IB02/02770

PCT Pub. Number WO2003/008664

Priority 60/306,014 17.07.01 US; 10/157,466 29.05.02 US

Filing date 15 July 2002

Wipo publication date 3 March 2003

International Classifications

C23C 016/40 Chemical deposition or plating by decomposition - Oxides

Event Publications

9 January 2003 Complete Application Filed

  Priority application(s): 60/306,014 17.07.01 US; 10/157,466 29.05.02 US

22 May 2003 Application Open to Public Inspection

  Published as AU-A-2002317422

8 April 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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