SEMICONDUCTOR STRUCTURES WITH COPLANER SURFACES

Details for Australian Patent Application No. 2002316721 (hide)

Owner MOTOROLA, INC.

Inventors MASTROIANNI, Sal, T.

Pub. Number AU-A-2002316721

PCT Number PCT/US02/22801

PCT Pub. Number WO2003/009377

Priority 09/908,883 20.07.01 US

Filing date 17 July 2002

Wipo publication date 3 March 2003

International Classifications

H01L 021/8258 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/20 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

9 January 2003 Complete Application Filed

  Priority application(s): 09/908,883 20.07.01 US

22 May 2003 Application Open to Public Inspection

  Published as AU-A-2002316721

8 April 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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