CATADIOPTRIC MULTI-MIRROR SYSTEMS FOR PROTECTION LITHOGRAPHY

Details for Australian Patent Application No. 2002316719 (hide)

Owner CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG

Inventors ULRICH, Wilhelm; HUDYMA, Russell

Pub. Number AU-A-2002316719

PCT Number PCT/US02/22766

PCT Pub. Number WO2004/010200

Filing date 17 July 2002

Wipo publication date 9 February 2004

International Classifications

G02B 017/08 Systems with reflecting surfaces, with or without refracting elements - Catadioptric systems

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

9 January 2003 Complete Application Filed

18 March 2004 Application Open to Public Inspection

  Published as AU-A-2002316719

7 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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