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Details for Australian Patent Application No. 2002316672 (hide)

Owner NEWPORT CORPORATION

Inventors FILIPSKI, Paul, S.; BACCHI, Paul

Pub. Number AU-A-2002316672

PCT Number PCT/US02/22160

PCT Pub. Number WO2003/006705

Priority 60/305,420 13.07.01 US

Filing date 12 July 2002

Wipo publication date 29 January 2003

International Classifications

C23C 016/00 Chemical deposition or plating by decomposition

B65G 049/07 Conveying systems characterised by their application for specified purposes not otherwise provided for - for semiconductor wafers

Event Publications

9 January 2003 Complete Application Filed

  Priority application(s): 60/305,420 13.07.01 US

22 May 2003 Application Open to Public Inspection

  Published as AU-A-2002316672

8 April 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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