INTEGRATION OF FAULT DETECTION WITH RUN-TO-RUN CONTROL

Details for Australian Patent Application No. 2002316650 (hide)

Owner APPLIED MATERIALS, INC.

Inventors REISS, Terry, P.; SHANMUGASUNDRAM, Arulkumar, P.; SCHWARM, Alexander, T.

Pub. Number AU-A-2002316650

PCT Number PCT/US02/21942

PCT Pub. Number WO2003/009345

Priority 60/305,140 16.07.01 US; 10/135,405 01.05.02 US

Filing date 12 July 2002

Wipo publication date 3 March 2003

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

9 January 2003 Complete Application Filed

  Priority application(s): 60/305,140 16.07.01 US; 10/135,405 01.05.02 US

22 May 2003 Application Open to Public Inspection

  Published as AU-A-2002316650

8 April 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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