ROTATING SUSCEPTOR AND METHOD OF PROCESSING SUBSTRATES

Details for Australian Patent Application No. 2002316635 (hide)

Owner MOORE EPITAXIAL, INC.

Inventors NISHIKAWA, Katsuhito

Pub. Number AU-A-2002316635

PCT Number PCT/US02/21809

PCT Pub. Number WO2003/014414

Priority 09/927,744 09.08.01 US

Filing date 9 July 2002

Wipo publication date 24 February 2003

International Classifications

C23C 016/458 Chemical deposition or plating by decomposition - characterised by the method used for supporting substrates in the reaction chamber

C30B 025/12 Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth - Substrate holders or susceptors

Event Publications

9 January 2003 Complete Application Filed

  Priority application(s): 09/927,744 09.08.01 US

19 June 2003 Application Open to Public Inspection

  Published as AU-A-2002316635

6 May 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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