MICROELECTRONIC CLEANING COMPOSITIONS CONTAINING AMMONIA-FREE FLUORIDE SALTS

Details for Australian Patent Application No. 2002316588 (hide)

Owner MALLINCKRODT BAKER INC.

Inventors HSU, Chin-Pin, Sherman

Pub. Number AU-A-2002316588

PCT Number PCT/US02/21436

PCT Pub. Number WO2003/006599

Priority 60/304,033 09.07.01 US

Filing date 8 July 2002

Wipo publication date 29 January 2003

International Classifications

C11D 007/32 Compositions of detergents based essentially on non-surface-active compounds

C11D 003/02 Other compounding ingredients of detergent compositions covered in group -

C11D 007/50 Compositions of detergents based essentially on non-surface-active compounds - Solvents

H01L 021/306 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C11D 003/30 Other compounding ingredients of detergent compositions covered in group

H01L 021/3213 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C11D 007/10 Compositions of detergents based essentially on non-surface-active compounds

Event Publications

9 January 2003 Complete Application Filed

  Priority application(s): 60/304,033 09.07.01 US

22 May 2003 Application Open to Public Inspection

  Published as AU-A-2002316588

8 April 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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