MULTISTEP LASER PROCESSING OF WAFERS SUPPORTING SURFACE DEVICE LAYERS

Details for Australian Patent Application No. 2002316481 (hide)

Owner ELECTRO SCIENTIFIC INDUSTRIES, INC.

Inventors FAHEY, Kevin, P.; ZOU, Lian-Cheng; O'BRIEN, James, N.; SUN, Yunlong; WOLFE, Michael, J.

Pub. Number AU-A-2002316481

PCT Number PCT/US02/20826

PCT Pub. Number WO2003/002289

Priority 60/301,701 28.06.01 US; 10/017,497 14.12.01 US; 10/165,428 06.06.02 US

Filing date 28 June 2002

Wipo publication date 3 March 2003

International Classifications

B23K 026/38 Working by laser beam, e.g. welding, cutting, boring

C04B 041/91 After-treatment of mortars, concrete, artificial stone or ceramics - involving the removal of part of the materials of the treated articles, e.g. etching

Event Publications

9 January 2003 Complete Application Filed

  Priority application(s): 60/301,701 28.06.01 US; 10/017,497 14.12.01 US; 10/165,428 06.06.02 US

15 May 2003 Application Open to Public Inspection

  Published as AU-A-2002316481

18 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2002316482-PREPARATION OF CELLULOSIC MATERIALS

2002316480-TISSUE TENSIONING ELECTROTHERAPY DEVICE