CONFIGURABLE PLASMA VOLUME ETCH CHAMBER

Details for Australian Patent Application No. 2002316325 (hide)

Owner LAM RESEARCH CORPORATION

Inventors YEN, Bi-Ming; NI, Tuqiang; LI, Lumin; HEMKER, David

Pub. Number AU-A-2002316325

PCT Number PCT/US02/19695

PCT Pub. Number WO2003/003403

Priority 09/895,537 29.06.01 US

Filing date 21 June 2002

Wipo publication date 3 March 2003

International Classifications

H01J 037/32 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

Event Publications

9 January 2003 Complete Application Filed

  Priority application(s): 09/895,537 29.06.01 US

15 May 2003 Application Open to Public Inspection

  Published as AU-A-2002316325

18 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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