METHOD AND APPARATUS FOR DISTRIBUTING FLUID TO A POLISHING SURFACE DURING CHEMICAL MECHANICAL POLISHING

Details for Australian Patent Application No. 2002316310 (hide)

Owner SPEEDFAM-IPEC CORPORATION

Inventors EATON, Robert, A.

Pub. Number AU-A-2002316310

PCT Number PCT/US02/19581

PCT Pub. Number WO2003/002302

Priority 09/893,131 27.06.01 US

Filing date 20 June 2002

Wipo publication date 3 March 2003

International Classifications

B24B 057/02 Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents

B24B 037/04 Lapping machines or devices, i.e. requiring pulverulent abrading substances inserted between a lap of relatively soft but rigid material and the surface to be lapped - designed for working plane surfaces

Event Publications

9 January 2003 Complete Application Filed

  Priority application(s): 09/893,131 27.06.01 US

15 May 2003 Application Open to Public Inspection

  Published as AU-A-2002316310

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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