MICROELECTRONIC SUBSTRATE HAVING CONDUCTIVE MATERIAL WITH BLUNT CORNERED APERTURES, AND ASSOCIATED METHODS FOR REMOVING CONDUCTIVE MATERIAL

Details for Australian Patent Application No. 2002316303 (hide)

Owner MICRON TECHNOLOGY, INC.

Inventors MEIKLE, Scott, G.; MOORE, Scott, E.; LEE, Whonchee

Pub. Number AU-A-2002316303

PCT Number PCT/US02/19496

PCT Pub. Number WO2003/001582

Priority 09/888,084 21.06.01 US; 09/888,002 21.06.01 US; 09/887,767 21.06.01 US

Filing date 20 June 2002

Wipo publication date 8 January 2003

International Classifications

H01L 021/3213 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

9 January 2003 Complete Application Filed

  Priority application(s): 09/888,084 21.06.01 US; 09/888,002 21.06.01 US; 09/887,767 21.06.01 US

19 June 2003 Application Open to Public Inspection

  Published as AU-A-2002316303

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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