MICRO-ELECTROMECHANICAL SWITCH HAVING A DEFORMABLE ELASTOMERIC CONDUCTIVE ELEMENT

Details for Australian Patent Application No. 2002316298 (hide)

Owner INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventors GREENBERG, David, R.; JAHNES, Christopher, V.; LUND, Jennifer, L.; SAENGER, Katherine, L.; VOLANT, Richard, P.; DELIGIANNI, Hariklia

Pub. Number AU-A-2002316298

PCT Number PCT/US02/19449

PCT Pub. Number WO2003/107372

Filing date 14 June 2002

Wipo publication date 31 December 2003

International Classifications

H01H 057/00 Electrostrictive relays

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

9 January 2003 Complete Application Filed

26 February 2004 Application Open to Public Inspection

  Published as AU-A-2002316298

3 March 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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