APPARATUS AND METHOD FOR DETERMINING CLAMPING STATUS OF SEMICONDUCTOR WAFER

Details for Australian Patent Application No. 2002316082 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors JONES, William; MOROZ, Paul; MITROVIC, Andrej

Pub. Number AU-A-2002316082

PCT Number PCT/US02/14582

PCT Pub. Number WO2002/101377

Priority 60/296,145 07.06.01 US

Filing date 9 May 2002

Wipo publication date 23 December 2002

International Classifications

G01N 029/00 Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves

G01H 005/00 Measuring propagation velocity of ultrasonic, sonic or infrasonic waves

H02N 013/00 Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect

Event Publications

9 January 2003 Complete Application Filed

  Priority application(s): 60/296,145 07.06.01 US

15 May 2003 Application Open to Public Inspection

  Published as AU-A-2002316082

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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