METHOD FOR FORMING AN OXIDE LAYER

Details for Australian Patent Application No. 2002316056 (hide)

Owner MOTOROLA, INC.

Inventors TSENG, Hsing-Huang,; CHANG, Julie, C. H.; ALVIS, John, R.; REID, Kimberly, G.

Pub. Number AU-A-2002316056

PCT Number PCT/US02/13881

PCT Pub. Number WO2002/101809

Priority 09/879,444 11.06.01 US

Filing date 2 May 2002

Wipo publication date 23 December 2002

International Classifications

H01L 021/314 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/316 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/28 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

9 January 2003 Complete Application Filed

  Priority application(s): 09/879,444 11.06.01 US

15 May 2003 Application Open to Public Inspection

  Published as AU-A-2002316056

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2002316057-METHOD OF FORMING AN INTEGRATED CIRCUIT DEVICE USING DUMMY FEATURES AND STRUCTURE THEREOF

2002316055-BARRIER DEVICE AND METHOD FOR BUILDING BARRIER WALL