SELECTIVE BASE ETCHING

Details for Australian Patent Application No. 2002316016 (hide)

Owner TELEFONAKTIEBOLAGET L M ERICSSON

Inventors JOHANSSON, Ted; NORSTROM, Hans

Pub. Number AU-A-2002316016

PCT Number PCT/SE02/01361

PCT Pub. Number WO2003/009353

Priority 0102560-0 18.07.01 SE; 0103980-9 28.11.01 SE

Filing date 9 July 2002

Wipo publication date 3 March 2003

International Classifications

H01L 021/20 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/30 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/328 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

9 January 2003 Complete Application Filed

  Priority application(s): 0102560-0 18.07.01 SE; 0103980-9 28.11.01 SE

22 May 2003 Application Open to Public Inspection

  Published as AU-A-2002316016

8 April 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2002316017-Analytical estimation of performance of a sensor system

2002316015-A METHOD FOR MANUFACTURING A BIPLATE ASSEMBLY, A BIPLATE ASSEMBLY AND A BIPOLAR BATTERY