SUBSTRATE PROCESSING APPARATUS

Details for Australian Patent Application No. 2002315761 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors KAMAMOTO, Hirotsugu; YONEMURA, Shuichi; IMAFU, Takashi; SAKAMOTO, Kazuhisa; AIUCHI, Takashi; SUZUKI, Akihito

Pub. Number AU-A-2002315761

PCT Number PCT/JP02/06683

PCT Pub. Number WO2003/005423

Priority 2001-203322 04.07.01 JP

Filing date 2 July 2002

Wipo publication date 21 January 2003

International Classifications

H01L 021/02 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof -

G06F 003/14 Input arrangements for transferring data to be processed into a form capable of being handled by the computer - Digital output to display device

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

G06F 017/50 Digital computing or data processing equipment or methods, specially adapted for specific functions - Computer-aided design

Event Publications

2 January 2003 Complete Application Filed

  Priority application(s): 2001-203322 04.07.01 JP

22 May 2003 Application Open to Public Inspection

  Published as AU-A-2002315761

18 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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