PLASMA PROCESSOR AND PLASMA PROCESSING METHOD

Details for Australian Patent Application No. 2002315758 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors SAKAMOTO, Yuichiro; HIGUCHI, Kimihiro; OOHASHI, Kaoru; UEDA, Takehiro; SHIBUYA, Munehiro; GONDAI, Tadashi; KIKUCHI, Akihiro; KAYAMORI, Satoshi; SHIMA, Shinya

Pub. Number AU-A-2002315758

PCT Number PCT/JP02/06665

PCT Pub. Number WO2003/009363

Priority 2001-216424 17.07.01 JP; 2002-68423 13.03.02 JP; 2001-210035 10.07.01 JP

Filing date 2 July 2002

Wipo publication date 3 March 2003

International Classifications

H01L 021/3065 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

2 January 2003 Complete Application Filed

  Priority application(s): 2001-216424 17.07.01 JP; 2002-68423 13.03.02 JP; 2001-210035 10.07.01 JP

22 May 2003 Application Open to Public Inspection

  Published as AU-A-2002315758

8 April 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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