SEMICONDUCTOR PROCESS RESIDUE REMOVAL COMPOSITION AND PROCESS

Details for Australian Patent Application No. 2002315510 (hide)

Owner EKC TECHNOLOGY, INC.

Inventors MALONEY, David, J.; LEE, Wai Mun; IP, Katy; DINH, Xuan-Dung

Pub. Number AU-A-2002315510

PCT Number PCT/US02/20840

PCT Pub. Number WO2003/104185

Priority 10/162,679 06.06.02 US

Filing date 1 July 2002

Wipo publication date 22 December 2003

International Classifications

C07C 215/14 Compounds containing amino and hydroxy groups bound to the same carbon skeleton

H01L 021/306 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

2 January 2003 Complete Application Filed

  Priority application(s): 10/162,679 06.06.02 US

19 February 2004 Application Open to Public Inspection

  Published as AU-A-2002315510

24 February 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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